![](/img/cover-not-exists.png)
[IEEE 32nd European Solid-State Device Research Conference - Firenze, Italy (2002.9.24-2002.9.26)] 32nd European Solid-State Device Research Conference - Post-Process CMOS Front End Engineering With Focused Ion Beams
Lugstein, A., Brezna, W., Goebel, B., Palmetshofer, L., Bertagnolli, E.Year:
2002
DOI:
10.1109/essderc.2002.194882
File:
PDF, 395 KB
2002