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[IEEE ICM'2001 Proceedings. 13th International Conference on Microelectronics - Rabat, Morocco (2001.10.29-2001.10.31)] ICM 2001 Proceedings. The 13th International Conference on Microelectronics. - Conception of single-lithography and space technologies of ULSI and WSI on functional nanoelectronic and optoelectronic elements
Bubennikov, A.N.Year:
2001
Language:
english
DOI:
10.1109/icm.2001.997496
File:
PDF, 390 KB
english, 2001