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[IEEE Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004. - Osaka, Japan (2004.10.26-2004.10.29)] Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004. - Impact of the tunnel etching process on electrical performances of SON devices.
Borel, S., Arvei, C., Bilde, J., Caubet, V., Chanemougame, D., Monfray, S., Ranica, R., Skotnick, T.Year:
2004
Language:
english
DOI:
10.1109/imnc.2004.245716
File:
PDF, 239 KB
english, 2004