[IEEE Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004. - Osaka, Japan (2004.10.26-2004.10.29)] Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004. - Evaluation of metal-insulatur-metal free-space-wiring fabricated by FIB-CVD
Nakamatsu, K., Kometani, R., Morita, T., Kaito, T., Fujita, J., Ochiai, Y., Ichihashi, T., Tajima, T., Matsui, S.Year:
2004
Language:
english
DOI:
10.1109/imnc.2004.245730
File:
PDF, 235 KB
english, 2004