[IEEE Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004. - Osaka, Japan (2004.10.26-2004.10.29)] Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004. - Characteristics of Mo/Ru/Si multilayer reflector structure
Tae Geun Kim,, Woo Sam Kim,, In-Yong Kang,, Yong-Chae Chung,, Jinho Ahn,Year:
2004
Language:
english
DOI:
10.1109/imnc.2004.245743
File:
PDF, 212 KB
english, 2004