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[IEEE Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004. - Osaka, Japan (2004.10.26-2004.10.29)] Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004. - Simulation of low-energy ion implantation process by atomistic modeling
Oh-Seob Kwon,, h-Hyun Seo,, Jae-Hyun Yoo,, Ki-Dong Kim,, Jun-Gu Lee,, II-Soo Park,, Tae-Young Won,Year:
2004
Language:
english
DOI:
10.1109/imnc.2004.245767
File:
PDF, 358 KB
english, 2004