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[IEEE Extended Abstracts of International Workshop on Gate Insulator - Toyko, Japan (2003.11.6-2003.11.7)] Extended Abstracts of International Workshop on Gate Insulator (IEEE Cat. No.03EX765) - EOT scaling and device issues for high-k gate dielectrics

Gardner, M.I., Gopalan, S., Gutt, J., Peterson, J., Hong-Jyh Li,, Huff, H.R.
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Year:
2003
Language:
english
DOI:
10.1109/iwgi.2003.159206
File:
PDF, 277 KB
english, 2003
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