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Fabrication of masks for electron-beam projection lithography
M. Lercel, C. Magg, M. Barrett, K. Collins, M. Trybendis, N. Caldwell, R. Jeffer, L. BouchardYear:
2000
Language:
english
DOI:
10.1116/1.1314370
File:
PDF, 865 KB
english, 2000