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Ion channeling effects on the focused ion beam milling of Cu
B. W. Kempshall, S. M. Schwarz, B. I. Prenitzer, L. A. Giannuzzi, R. B. Irwin, F. A. StevieYear:
2001
Language:
english
DOI:
10.1116/1.1368670
File:
PDF, 931 KB
english, 2001