Electromigration performance of AlCu/Ti and AlCu/Ti/TiN/Ti...

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Electromigration performance of AlCu/Ti and AlCu/Ti/TiN/Ti metallization

K. Kamoshida
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Year:
2001
Language:
english
DOI:
10.1116/1.1418400
File:
PDF, 669 KB
english, 2001
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