Electron induced chemical nanolithography with...

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Electron induced chemical nanolithography with self-assembled monolayers

W. Geyer, V. Stadler, W. Eck, A. Gölzhäuser, M. Grunze, M. Sauer, T. Weimann, P. Hinze
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Year:
2001
Language:
english
DOI:
10.1116/1.1421560
File:
PDF, 815 KB
english, 2001
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