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Comparative evaluation of protective coatings and focused ion beam chemical vapor deposition processes
B. W. Kempshall, L. A. Giannuzzi, B. I. Prenitzer, F. A. Stevie, S. X. DaYear:
2002
Language:
english
DOI:
10.1116/1.1445165
File:
PDF, 811 KB
english, 2002