Advanced time-multiplexed plasma etching of high aspect...

  • Main
  • Advanced time-multiplexed plasma...

Advanced time-multiplexed plasma etching of high aspect ratio silicon structures

M. A. Blauw, G. Craciun, W. G. Sloof, P. J. French, E. Van Der Drift
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2002
Language:
english
DOI:
10.1116/1.1518018
File:
PDF, 645 KB
english, 2002
Conversion to is in progress
Conversion to is failed