Copper device editing: Strategy for focused ion beam...

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Copper device editing: Strategy for focused ion beam milling of copper

J. D. Casey, M. Phaneuf, C. Chandler, M. Megorden, K. E. Noll, R. Schuman, T. J. Gannon, A. Krechmer, D. Monforte, N. Antoniou, N. Bassom, J. Li, P. Carleson, C. Huynh
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Year:
2002
Language:
english
DOI:
10.1116/1.1521736
File:
PDF, 857 KB
english, 2002
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