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Submillimeter-wavelength plasma chemical diagnostics for semiconductor manufacturing
E. C. Benck, G. Y. Golubiatnikov, G. T. Fraser, B. Ji, S. A. Motika, E. J. KarwackiYear:
2003
Language:
english
DOI:
10.1116/1.1605431
File:
PDF, 486 KB
english, 2003