Damage-free extreme ultraviolet mask with TaBN absorber

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Damage-free extreme ultraviolet mask with TaBN absorber

T. Shoki, T. Kinoshita, N. Sakaya, M. Hosoya, R. Ohkubo, Y. Usui, H. Kobayashi, O. Nagarekawa
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Year:
2003
Language:
english
DOI:
10.1116/1.1610004
File:
PDF, 645 KB
english, 2003
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