Development of void-free focused ion beam-assisted metal...

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Development of void-free focused ion beam-assisted metal deposition process for subhalf-micrometer high aspect ratio vias

V. Ray, N. Antoniou, N. Bassom, A. Krechmer, A. Saxonis
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Year:
2003
Language:
english
DOI:
10.1116/1.1621666
File:
PDF, 1.07 MB
english, 2003
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