Step and flash imprint lithography template...

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Step and flash imprint lithography template characterization, from an etch perspective

W. J. Dauksher, D. P. Mancini, K. J. Nordquist, D. J. Resnick, D. L. Standfast, D. Convey, Y. Wei
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Year:
2003
Language:
english
DOI:
10.1116/1.1629299
File:
PDF, 989 KB
english, 2003
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