Electrical and optical properties of hydrogen plasma treated n-AlGaN films grown by hydride vapor phase epitaxy
A. Y. Polyakov, N. B. Smirnov, A. V. Govorkov, N. V. Pashkova, A. A. Shlensky, K. H. Baik, S. J. Pearton, B. Luo, F. Ren, J. M. ZavadaYear:
2004
Language:
english
DOI:
10.1116/1.1640395
File:
PDF, 451 KB
english, 2004