Development of projection optics set-3 for high-numerical-aperture extreme ultraviolet exposure tool (HiNA)
T. Oshino, S. Takahashi, T. Yamamoto, T. Miyoshi, M. Shiraishi, T. Komiya, N. Kandaka, H. Kondo, K. Mashima, K. Nomura, K. Murakami, T. Okuyama, H. Oizumi, I. Nishiyama, S. OkazakiYear:
2004
Language:
english
DOI:
10.1116/1.1808734
File:
PDF, 654 KB
english, 2004