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Repair of step and flash imprint lithography templates
W. J. Dauksher, K. J. Nordquist, N. V. Le, K. A. Gehoski, D. P. Mancini, D. J. Resnick, L. Casoose, R. Bozak, R. White, J. Csuy, D. LeeYear:
2004
Language:
english
DOI:
10.1116/1.1815300
File:
PDF, 942 KB
english, 2004