Initial lithography results from the digital electrostatic e-beam array lithography concept
L. R. Baylor, W. L. Gardner, X. Yang, R. J. Kasica, M. A. Guillorn, B. Blalock, H. Cui, D. K. Hensley, S. Islam, D. H. Lowndes, A. V. Melechko, V. I. Merkulov, D. C. Joy, P. D. Rack, M. L. Simpson, D.Year:
2004
Language:
english
DOI:
10.1116/1.1824060
File:
PDF, 755 KB
english, 2004
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