Compliant pin chuck for minimizing the effect of backside...

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Compliant pin chuck for minimizing the effect of backside particles on wafer planarity

P. K. Nimmakayala, S. V. Sreenivasan
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Year:
2004
Language:
english
DOI:
10.1116/1.1825017
File:
PDF, 697 KB
english, 2004
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