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Conformability and optical reflectance of Ti∕Au film sputtered on the Si vertical sidewalls
K. Jo, S. Yun, N. Punithavelan, S. Ho Jeong, S. Kyu Lee, J. LeeYear:
2005
Language:
english
DOI:
10.1116/1.2052712
File:
PDF, 1.05 MB
english, 2005