Iridium/silicon capping layer for soft x-ray and extreme...

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Iridium/silicon capping layer for soft x-ray and extreme ultraviolet mirrors

S. T. Prisbrey, S. P. Vernon, W. M. Clift
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Year:
2005
Language:
english
DOI:
10.1116/1.2122727
File:
PDF, 822 KB
english, 2005
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