Ultraviolet-based nanoimprint at reduced environmental...

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Ultraviolet-based nanoimprint at reduced environmental pressure

A. Fuchs, M. Bender, U. Plachetka, U. Hermanns, H. Kurz
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Year:
2005
Language:
english
DOI:
10.1116/1.2132325
File:
PDF, 847 KB
english, 2005
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