Application of molecular dynamics for low-energy ion implantation in crystalline silicon
H. Y. Chan, M. P. Srinivasan, N. J. Montgomery, C. P. A. Mulcahy, S. Biswas, H. L. Gossmann, M. Harris, K. Nordlund, F. Benistant, C. M. Ng, D. Gui, L. ChanYear:
2006
Language:
english
DOI:
10.1116/1.2137333
File:
PDF, 509 KB
english, 2006