Investigation of the nonuniformities in polyurethane...

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Investigation of the nonuniformities in polyurethane chemical mechanical planarization pads

P. B. Zantye, A. Kumar, W. Dallas, S. Ostapenko, A. K. Sikder
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Year:
2006
Language:
english
DOI:
10.1116/1.2137339
File:
PDF, 1.34 MB
english, 2006
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