Scanning capacitance microscopy: Quantitative carrier profiling down to nanostructures
F. Giannazzo, V. Raineri, S. Mirabella, G. Impellizzeri, F. Priolo, M. Fedele, R. MucciatoYear:
2006
Language:
english
DOI:
10.1116/1.2151907
File:
PDF, 613 KB
english, 2006