![](/img/cover-not-exists.png)
Fabrication of nanoelectromechanical resonators using a cryogenic etching technique
N. Nelson-fitzpatrick, K. Westra, P. Li, S. Mccolman, N. Wilding, S. EvoyYear:
2006
Language:
english
DOI:
10.1116/1.2366608
File:
PDF, 486 KB
english, 2006