Fabrication of nanoelectromechanical resonators using a...

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Fabrication of nanoelectromechanical resonators using a cryogenic etching technique

N. Nelson-fitzpatrick, K. Westra, P. Li, S. Mccolman, N. Wilding, S. Evoy
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Year:
2006
Language:
english
DOI:
10.1116/1.2366608
File:
PDF, 486 KB
english, 2006
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