Integrated multi-electron-beam blanker array for sub-10-nm...

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Integrated multi-electron-beam blanker array for sub-10-nm electron beam induced deposition

Y. Zhang, C. T. H. Heerkens, M. J. Van Bruggen, P. Kruit
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Year:
2006
Language:
english
DOI:
10.1116/1.2366677
File:
PDF, 1.11 MB
english, 2006
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