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Submicron three-dimensional structures fabricated by reverse contact UV nanoimprint lithography
N. Kehagias, V. Reboud, G. Chansin, M. Zelsmann, C. Jeppesen, F. Reuther, C. Schuster, M. Kubenz, G. Gruetzner, C. M. Sotomayor TorresYear:
2006
Language:
english
DOI:
10.1116/1.2388962
File:
PDF, 757 KB
english, 2006