Electrostatic chucking for extreme ultraviolet lithography: Simulations and experiments
M. Nataraju, J. Sohn, S. Veeraraghavan, A. R. Mikkelson, K. T. Turner, R. L. Engelstad, C. K. Van Peski, K. J. OrvekYear:
2006
Language:
english
DOI:
10.1116/1.2388967
File:
PDF, 1.12 MB
english, 2006