Study of plasma-induced damage of porous ultralow-k...

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Study of plasma-induced damage of porous ultralow-k dielectric films during photoresist stripping

S. Xu, C. Qin, L. Diao, D. Gilbert, L. Hou, A. Wiesnoski, E. Busch, R. Mcgowan, B. White, F. Weber
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Year:
2007
Language:
english
DOI:
10.1116/1.2431349
File:
PDF, 731 KB
english, 2007
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