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Molecular-beam epitaxy growth of device-compatible GaAs on silicon substrates with thin (∼80 nm) Si[sub 1−x]Ge[sub x] step-graded buffer layers for high-κ III-V metal-oxide-semiconductor field effect transistor applications
M. M. Oye, D. Shahrjerdi, I. Ok, J. B. Hurst, S. D. Lewis, S. Dey, D. Q. Kelly, S. Joshi, T. J. Mattord, X. Yu, M. A. Wistey, J. S. Harris, A. L. Holmes, J. C. Lee, S. K. BanerjeeYear:
2007
Language:
english
DOI:
10.1116/1.2713119
File:
PDF, 1006 KB
english, 2007