![](/img/cover-not-exists.png)
Integration of functional epitaxial oxides into silicon: From high-K application to nanostructures
H. J. Osten, D. Kühne, A. Laha, M. Czernohorsky, E. Bugiel, A. FisselYear:
2007
Language:
english
DOI:
10.1116/1.2720858
File:
PDF, 714 KB
english, 2007