Benchmarking of 50 nm features in thermal nanoimprint

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Benchmarking of 50 nm features in thermal nanoimprint

C. Gourgon, N. Chaix, H. Schift, M. Tormen, S. Landis, C. M. Sotomayor Torres, A. Kristensen, R. H. Pedersen, M. B. Christiansen, I. Fernandez-cuesta, D. Mendels, L. Montelius, T. Haatainen
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Year:
2007
Language:
english
DOI:
10.1116/1.2794064
File:
PDF, 874 KB
english, 2007
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