Annealing of electron beam induced deposits of platinum...

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Annealing of electron beam induced deposits of platinum from Pt(PF[sub 3])[sub 4]

M. H. Ervin, D. Chang, B. Nichols, A. Wickenden, J. Barry, J. Melngailis
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Year:
2007
Language:
english
DOI:
10.1116/1.2806978
File:
PDF, 1.09 MB
english, 2007
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