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Coarse-grain simulation of viscous flow and stamp...

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Coarse-grain simulation of viscous flow and stamp deformation in nanoimprint

V. Sirotkin, A. Svintsov, S. Zaitsev, H. Schift
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Year:
2007
Language:
english
DOI:
10.1116/1.2812534
File:
PDF, 1.15 MB
english, 2007
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