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Advances in optical carrier profiling through high-frequency modulated optical reflectance
J. Bogdanowicz, F. Dortu, T. Clarysse, W. Vandervorst, D. Shaughnessy, A. Salnik, L. Nicolaides, J. OpsalYear:
2008
Language:
english
DOI:
10.1116/1.2819252
File:
PDF, 876 KB
english, 2008