Patterned wafer defect density analysis of step and flash...

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Patterned wafer defect density analysis of step and flash imprint lithography

I. Mcmackin, W. Martin, J. Perez, K. Selinidis, J. Maltabes, F. Xu, D. Resnick, S. V. Sreenivasan
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Year:
2008
Language:
english
DOI:
10.1116/1.2825164
File:
PDF, 838 KB
english, 2008
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