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Influence of base and photoacid generator on deprotection blur in extreme ultraviolet photoresists and some thoughts on shot noise
C. N. Anderson, P. P. Naulleau, D. Niakoula, E. Hassanein, R. Brainard, G. Gallatin, K. DeanYear:
2008
Language:
english
DOI:
10.1116/1.2968615
File:
PDF, 715 KB
english, 2008