Gd silicate: A high-k dielectric compatible with high...

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Gd silicate: A high-k dielectric compatible with high temperature annealing

H. D. B. Gottlob, A. Stefani, M. Schmidt, M. C. Lemme, H. Kurz, I. Z. Mitrovic, M. Werner, W. M. Davey, S. Hall, P. R. Chalker, K. Cherkaoui, P. K. Hurley, J. Piscator, O. Engström, S. B. Newcomb
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Year:
2009
Language:
english
DOI:
10.1116/1.3025904
File:
PDF, 574 KB
english, 2009
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