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Preparation of diamond-shaped channels in SU-8 for optical control of the filling state
S. Möllenbeck, N. Bogdanski, A. Mayer, H. Scheer, J. Zajadacz, K. ZimmerYear:
2009
Language:
english
DOI:
10.1116/1.3237136
File:
PDF, 768 KB
english, 2009