Transparent hybrid polymer stamp copies with sub-50-nm resolution for thermal and UV-nanoimprint lithography
H. Schift, C. Spreu, M. Saidani, M. Bednarzik, J. Gobrecht, A. Klukowska, F. Reuther, G. Gruetzner, H. H. SolakYear:
2009
Language:
english
DOI:
10.1116/1.3250207
File:
PDF, 606 KB
english, 2009