Design specific variation in via/contact pattern transfer:...

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Design specific variation in via/contact pattern transfer: Full chip analysis

J. Choy, V. Sukharev, A. Markosian, A. Kteyan, Y. Granik, V. Bliznetsov
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Year:
2009
Language:
english
DOI:
10.1116/1.3253535
File:
PDF, 1.07 MB
english, 2009
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