Fabrication of complementary metal-oxide-semiconductor...

Fabrication of complementary metal-oxide-semiconductor integrated nanomechanical devices by ion beam patterning

Rius, G., Llobet, J., Borrisé, X., Mestres, N., Retolaza, A., Merino, S., Perez-Murano, F.
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Volume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3253550
File:
PDF, 1.45 MB
english, 2009
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