Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2009 Vol. 27; Iss. 6
Fabrication of complementary metal-oxide-semiconductor integrated nanomechanical devices by ion beam patterning
Rius, G., Llobet, J., Borrisé, X., Mestres, N., Retolaza, A., Merino, S., Perez-Murano, F.Volume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3253550
File:
PDF, 1.45 MB
english, 2009