Large-diameter roll mold fabrication method using a...

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Large-diameter roll mold fabrication method using a small-diameter quartz roll mold and UV nanoimprint lithography

J. Taniguchi, N. Unno, H. Maruyama
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Year:
2011
Language:
english
DOI:
10.1116/1.3657524
File:
PDF, 2.06 MB
english, 2011
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