Smart-cut layer transfer of single-crystal SiC using...

  • Main
  • Smart-cut layer transfer of...

Smart-cut layer transfer of single-crystal SiC using spin-on-glass

J. Lee, I. Bargatin, J. Park, K. M. Milaninia, L. S. Theogarajan, R. Sinclair, R. T. Howe
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2012
Language:
english
DOI:
10.1116/1.4734006
File:
PDF, 2.63 MB
english, 2012
Conversion to is in progress
Conversion to is failed