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Smart-cut layer transfer of single-crystal SiC using spin-on-glass
J. Lee, I. Bargatin, J. Park, K. M. Milaninia, L. S. Theogarajan, R. Sinclair, R. T. HoweYear:
2012
Language:
english
DOI:
10.1116/1.4734006
File:
PDF, 2.63 MB
english, 2012