Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2012 Vol. 30; Iss. 5
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Void detection in copper interconnects using energy dispersive x-ray spectroscopy
Tsigkourakos, Menelaos, Vandervorst, Wilfried, Hantschel, Thomas, Franquet, Alexis, Conard, Thierry, Carbonell, LaureenVolume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4742855
File:
PDF, 1.21 MB
english, 2012